Optical and electrical properties of Ge-implanted SiO₂ layers on n-Si and p-Si

Title
Optical and electrical properties of Ge-implanted SiO₂ layers on n-Si and p-Si
Authors
이원석정준용김효배채근화황정남임성일송종한
Keywords
Ge; SiO2; implantation; photoluminescence; carrier transport
Issue Date
2001-01
Publisher
Applied surface science
Citation
VOL 169-170, 463-467
URI
http://pubs.kist.re.kr/handle/201004/23743
ISSN
0169-4332
Appears in Collections:
KIST Publication > Article
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