Design and fabrication of thin-film bulk acoustic resonator

Title
Design and fabrication of thin-film bulk acoustic resonator
Authors
김인태김희영이시형이성준김형동이전국김남수주병권
Keywords
thin-film bulk acoustic wave resonator; RF design; RF sputtering; AlN
Issue Date
2001-01
Publisher
Proceeding of International Sensor Conference 2001
Citation
, 261-262
URI
http://pubs.kist.re.kr/handle/201004/23749
Appears in Collections:
KIST Publication > Conference Paper
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