Activation energy for the loss of substitutional carbon in Si0.984C0.016 grown by solid phase epitaxy

Title
Activation energy for the loss of substitutional carbon in Si0.984C0.016 grown by solid phase epitaxy
Authors
Yong Jenong KimTae Joon KimTae-Kyung KimByungwoo Park송종한
Keywords
SPE; FTIR; HR-XRD; substitutional carbon; RTA
Issue Date
2000-06
Publisher
한국진공학회지; Journal of the Korean Vacuum Society
Citation
VOL 4, NO 2, 50-54
URI
http://pubs.kist.re.kr/handle/201004/23800
ISSN
1225-8822
Appears in Collections:
KIST Publication > Article
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