A drastic change in structure and property of TiO₂ thin films deposited by metal-organic chemical vapor deposition with deposition temperature

Title
A drastic change in structure and property of TiO₂ thin films deposited by metal-organic chemical vapor deposition with deposition temperature
Authors
박정훈홍국선조운조
Keywords
TiO₂; thin film; chemical vapor deposition
Issue Date
2000-04
Publisher
Material Research Society
Citation
, 160-161
URI
http://pubs.kist.re.kr/handle/201004/23831
Appears in Collections:
KIST Publication > Conference Paper
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