Performance of fabry-perot microcavity structures with corrugated diaphragms

Title
Performance of fabry-perot microcavity structures with corrugated diaphragms
Authors
한재헌김지영김태송김정석
Keywords
fabry-perot mircrocavity structure; corrugated diaphragm; signal averaging effect; zero pressure offset effect; confocal scanning laser microscope
Issue Date
2000-02
Publisher
Sensors and actuators. A, Physical
Citation
VOL 79, 162-172
URI
http://pubs.kist.re.kr/handle/201004/23846
ISSN
0924-4247
Appears in Collections:
KIST Publication > Article
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