Performance of fabry-perot microcavity structures with corrugated diaphragms
- Performance of fabry-perot microcavity structures with corrugated diaphragms
- 한재헌; 김지영; 김태송; 김정석
- fabry-perot mircrocavity structure; corrugated diaphragm; signal averaging effect; zero pressure offset effect; confocal scanning laser microscope
- Issue Date
- Sensors and actuators. A, Physical
- VOL 79, 162-172
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- KIST Publication > Article
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