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dc.contributor.author한재헌-
dc.contributor.author김지영-
dc.contributor.author김태송-
dc.contributor.author김정석-
dc.date.accessioned2015-12-02T07:54:22Z-
dc.date.available2015-12-02T07:54:22Z-
dc.date.issued200002-
dc.identifier.citationVOL 79, 162-172-
dc.identifier.issn0924-4247-
dc.identifier.other12533-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/23846-
dc.publisherSensors and actuators. A, Physical-
dc.subjectfabry-perot mircrocavity structure-
dc.subjectcorrugated diaphragm-
dc.subjectsignal averaging effect-
dc.subjectzero pressure offset effect-
dc.subjectconfocal scanning laser microscope-
dc.titlePerformance of fabry-perot microcavity structures with corrugated diaphragms-
dc.typeArticle-
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