Mechanical and adhesion properties of Al/AlN multilayered thin films

Title
Mechanical and adhesion properties of Al/AlN multilayered thin films
Authors
이정훈김원목이택성정문교정병기김순광
Keywords
multilayer film; Residual stress; hardness; adhesion
Issue Date
2000-12
Publisher
Surface & coatings technology
Citation
VOL 133-134, 220-226
URI
http://pubs.kist.re.kr/handle/201004/23850
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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