Effect of substrate temperature on etched feature of thin chromium film and its application

Title
Effect of substrate temperature on etched feature of thin chromium film and its application
Authors
서상원김훈박종원이윤희박공석정재훈장진김동호오명환김남수주병권김훈
Keywords
etched feature; thin chromium film; substrate temperature
Issue Date
2000-11
Publisher
ISPSA 2000
Citation
, 197-197
URI
http://pubs.kist.re.kr/handle/201004/23877
Appears in Collections:
KIST Publication > Conference Paper
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