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dc.contributor.author서상원-
dc.contributor.author김훈-
dc.contributor.author박종원-
dc.contributor.author이윤희-
dc.contributor.author박공석-
dc.contributor.author정재훈-
dc.contributor.author장진-
dc.contributor.author김동호-
dc.contributor.author오명환-
dc.contributor.author김남수-
dc.contributor.author주병권-
dc.contributor.author김훈-
dc.date.accessioned2015-12-02T07:54:33Z-
dc.date.available2015-12-02T07:54:33Z-
dc.date.issued200011-
dc.identifier.citation, 197-197-
dc.identifier.other12267-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/23877-
dc.publisherISPSA 2000-
dc.subjectetched feature-
dc.subjectthin chromium film-
dc.subjectsubstrate temperature-
dc.titleEffect of substrate temperature on etched feature of thin chromium film and its application-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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