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Measurement of elastic modulus and Poisson's ratio of diamond-like carbon films

Title: Measurement of elastic modulus and Poisson's ratio of diamond-like carbon films

Authors: 조성진; 이광렬; 은광용; 고대홍

Keywords: thin films; elastic properties; micro-fabrication

Issue Date: 1999-05

Publisher: Mat. Res. Soc. Symp. Proc.

Citation: VOL 518, 203-208

URI: http://pubs.kist.re.kr/handle/201004/23990

Appears in Collections:: KIST Publication > Conference Paper

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