Measurement of elastic modulus and Poisson's ratio of diamond-like carbon films

Title
Measurement of elastic modulus and Poisson's ratio of diamond-like carbon films
Authors
조성진이광렬은광용고대홍
Keywords
thin films; elastic properties; micro-fabrication
Issue Date
1999-05
Publisher
Mat. Res. Soc. Symp. Proc.
Citation
VOL 518, 203-208
URI
http://pubs.kist.re.kr/handle/201004/23990
Appears in Collections:
KIST Publication > Conference Paper
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