Micro-tunneling sensor for vacuum level evaluation of field emission display

Title
Micro-tunneling sensor for vacuum level evaluation of field emission display
Authors
박흥우주병권박윤권김철주박정호오명환
Keywords
FEA; FED; MEMS; poly-Si emitter; vacuum sensor; cantilver; field emission; lift-off
Issue Date
1999-04
Publisher
1999 제1회 MEMS 학술대회 논문집; 1999 Proceedings of the 1st Korean MEMS Conference
Citation
, 255-258
URI
http://pubs.kist.re.kr/handle/201004/24000
Appears in Collections:
KIST Publication > Conference Paper
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