Internal antenna 를 이용한 inductively coupled plasma 내에서 발생된 이온의 존재비율 측정

Title
Internal antenna 를 이용한 inductively coupled plasma 내에서 발생된 이온의 존재비율 측정
Authors
조정희한승희이연희김영우임현의김곤호김옥경
Keywords
PSII
Issue Date
1999-02
Publisher
제 16 회 한국진공학회
Citation
, 166-166
URI
http://pubs.kist.re.kr/handle/201004/24025
Appears in Collections:
KIST Publication > Conference Paper
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