Nanometer scale patterning by cantilever-oscillating Atomic Force Microscope (AFM)

Title
Nanometer scale patterning by cantilever-oscillating Atomic Force Microscope (AFM)
Authors
현찬경최승철황성우김용김은규
Keywords
nanometer
Issue Date
1999-02
Publisher
제 6 회 한국반도체학술대회 논문집
Citation
, 47-48
URI
http://pubs.kist.re.kr/handle/201004/24026
Appears in Collections:
KIST Publication > Conference Paper
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