Measurement of sheath expansion in plasma source ion implantation

Title
Measurement of sheath expansion in plasma source ion implantation
Authors
김곤호김영우한승희이연희엄한섭조정희홍문표
Keywords
sheath expansion
Issue Date
1999-12
Publisher
Fifth International Workshop on Plasma-Based Ion Implantation
Citation
-33
URI
http://pubs.kist.re.kr/handle/201004/24030
Appears in Collections:
KIST Publication > Conference Paper
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