Fabrication of 3D antenna array using SU-8

Title
Fabrication of 3D antenna array using SU-8
Authors
심태석강호관김민철문성욱오명환황성우
Keywords
SU-8; 3D antenna; antenna; antenna coupled bolometer; bolometer; UV LIGA; LIGA like
Issue Date
1999-11
Publisher
적외선 영상센서 Conference
Citation
VOL 10, 128-133
URI
http://pubs.kist.re.kr/handle/201004/24040
Appears in Collections:
KIST Publication > Conference Paper
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