Effect of rapid thermal annealing on the memory window of ferroelectric YMnO3 thin films deposited on Si substrates

Title
Effect of rapid thermal annealing on the memory window of ferroelectric YMnO3 thin films deposited on Si substrates
Authors
김익수이호녕김용태최인훈
Keywords
YMnO3; rapid thermal annealing; ferroelectric gate; memory window
Issue Date
1999-01
Publisher
한국물리학회 회보, Bulletin of the Korean Physical Society
Citation
VOL 17, NO 2, 370-370
URI
http://pubs.kist.re.kr/handle/201004/24066
Appears in Collections:
KIST Publication > Conference Paper
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