The stacking faults and their strain effect at the Si/SiO₂ interfaces of a directly bonded SOI(silicon on insulator)

Title
The stacking faults and their strain effect at the Si/SiO₂ interfaces of a directly bonded SOI(silicon on insulator)
Authors
신동운최두진김긍호
Keywords
insulator
Issue Date
1999-01
Publisher
Thin solid films
Citation
VOL 346, 169-173
URI
http://pubs.kist.re.kr/handle/201004/24090
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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