Structure and optical properties of Si incorporated diamond-like carbon films deposited by r.f. plasma-assisted chemical vapor deposition

Title
Structure and optical properties of Si incorporated diamond-like carbon films deposited by r.f. plasma-assisted chemical vapor deposition
Authors
이순일김동섭이성규오수기이광렬
Keywords
diamond-like carbon; optical properties; optical gaps; SP2 clusters
Issue Date
1999-01
Publisher
Thin solid films
Citation
VOL 341, NO 1-2, 68-72
URI
http://pubs.kist.re.kr/handle/201004/24096
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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