Large area deposition of thick diamond film by direct-current PACVD

Title
Large area deposition of thick diamond film by direct-current PACVD
Authors
백영준이재갑이욱성은광용
Keywords
large area deposition; diamond; DC PACVD; chmical vapoor deposition; multi-cathode DC PACVD; large cathode DC PACVD
Issue Date
1999-01
Publisher
Thin solid films
Citation
VOL 341, 202-206
URI
http://pubs.kist.re.kr/handle/201004/24112
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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