Negative pattern generation technique by laser beam writing for integrated optics

Title
Negative pattern generation technique by laser beam writing for integrated optics
Authors
박경현김명욱변영태김선호조욱래박승한김웅최상삼
Keywords
laser beam writing
Issue Date
1998-09
Publisher
Japanese Journal of Applied Physics, Part 1- Regular Papers
Citation
VOL 37, NO 9A, 4844-4845
URI
http://pubs.kist.re.kr/handle/201004/24148
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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