In-situ vacuum packaging method for FEDs in ultra-high-vacuum chamber

Title
In-situ vacuum packaging method for FEDs in ultra-high-vacuum chamber
Authors
최우범주병권이윤희정지원오명환정성재이남양한정인조경익성만영
Keywords
MEMS
Issue Date
1998-05
Publisher
Proc. SID '98
Citation
, 593-596
URI
http://pubs.kist.re.kr/handle/201004/24182
ISSN
0098-0966
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE