Electrostatic bonding of silicon-to-ITO coated #7059 glass using Li-doped oxide interlayer

Title
Electrostatic bonding of silicon-to-ITO coated #7059 glass using Li-doped oxide interlayer
Authors
정지원주병권이덕중이윤희오명환최두진
Keywords
MEMS; FED; FEA
Issue Date
1998-11
Publisher
Journal of the Korean Physical Society
Citation
VOL 33, S406-S410
URI
http://pubs.kist.re.kr/handle/201004/24232
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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