A study of deposition rate and characterization of BN thin films prepared by CVD

Title
A study of deposition rate and characterization of BN thin films prepared by CVD
Authors
진용기이상렬남영우이중기박달근
Keywords
CVD
Issue Date
1998-01
Publisher
The Korean journal of chemical engineering
Citation
VOL 15, NO 6, 652-657
URI
http://pubs.kist.re.kr/handle/201004/24301
ISSN
0256-1115
Appears in Collections:
KIST Publication > Article
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