Effects of nitrogen on preventing the crystallization of amorphous Ta-Si-N diffusion barrier

Title
Effects of nitrogen on preventing the crystallization of amorphous Ta-Si-N diffusion barrier
Authors
김동준김용태박종완
Keywords
Ta-Si-N thin film
Issue Date
1997-04
Publisher
1997 MRS spring meeting, San Francisco
Citation
, 185-185
URI
http://pubs.kist.re.kr/handle/201004/24351
Appears in Collections:
KIST Publication > Conference Paper
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