Thermal stabilities of PECVD W-B-N thin films as a diffusion barrier.

Title
Thermal stabilities of PECVD W-B-N thin films as a diffusion barrier.
Authors
김용태김동준이창우박종완
Keywords
thermal stability
Issue Date
1997-10
Publisher
Multilevel interconnect technology (SPIE).
Citation
v. 3214, 48-56
URI
http://pubs.kist.re.kr/handle/201004/24391
Appears in Collections:
KIST Publication > Article
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