Large area diamond deposition by direct-current PACVD

Title
Large area diamond deposition by direct-current PACVD
Authors
백영준이재갑이욱성은광용
Issue Date
1997-10
Publisher
Proc. the 1st Asian-European international plasma surface engineering.
Citation
, 228-228
URI
http://pubs.kist.re.kr/handle/201004/24396
Appears in Collections:
KIST Publication > Conference Paper
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