Growth of highly oriented TiO2 thin films on InP(100) substrates by metalorganic chemical vapor deposition

Title
Growth of highly oriented TiO2 thin films on InP(100) substrates by metalorganic chemical vapor deposition
Authors
김은규손맹호민석기Y. K.Han염상섭
Keywords
MOCVD; TiO2; InP; thin films; columnar-structure
Issue Date
1997-01
Publisher
Journal of crystal growth
Citation
VOL 170, 803-807
URI
http://pubs.kist.re.kr/handle/201004/24399
ISSN
0022-0248
Appears in Collections:
KIST Publication > Article
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