Experimental analysis of the process of anodic bonding with an evaporated glass layer

Title
Experimental analysis of the process of anodic bonding with an evaporated glass layer
Authors
최우범주병권이윤희S. J. JeongM. R. Haskard이남양성만영오명환
Keywords
MEMS
Issue Date
1996-12
Publisher
MRS 1996 fall meeting, Boston, USA.
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/24493
Appears in Collections:
KIST Publication > Conference Paper
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