Improvement in the electrical properties of a (Ba,Sr)TiO3 capacitor by inserting a TiN layer between polycrystalline Si and Pt bottom electrodes

Title
Improvement in the electrical properties of a (Ba,Sr)TiO3 capacitor by inserting a TiN layer between polycrystalline Si and Pt bottom electrodes
Authors
김용태이창우
Issue Date
1996-01
Publisher
Philosophical magazine. B, Physics of condensed matter, structural, electronic, optical, and magnetic properties
Citation
VOL 74, NO 3, 293-299
URI
http://pubs.kist.re.kr/handle/201004/24556
ISSN
01418637
Appears in Collections:
KIST Publication > Article
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