Characterization of solid surfaces using time-of-flight secondary ion mass spectrometry.

Title
Characterization of solid surfaces using time-of-flight secondary ion mass spectrometry.
Authors
이연희한승희이정혜윤정현
Keywords
TOF-SIMS; Plasma ion implantation; Multilayer
Issue Date
1996-01
Publisher
Fifth Eurasia Conference on Chemical Sciences
Citation
, 31-31
URI
http://pubs.kist.re.kr/handle/201004/24576
Appears in Collections:
KIST Publication > Conference Paper
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