The thickness dependence of (Ba0.5Sr0.5)TiO3 thin films deposited on indium tin oxide-coated glass substrate using r.f. magnetron sputtering

Title
The thickness dependence of (Ba0.5Sr0.5)TiO3 thin films deposited on indium tin oxide-coated glass substrate using r.f. magnetron sputtering
Authors
김태송오명환김종희
Keywords
BST thin film; sputtering process; ITO substrate
Issue Date
1995-01
Publisher
Thin solid films
Citation
VOL 254, 273-277
URI
http://pubs.kist.re.kr/handle/201004/24634
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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