The study of facet evolution of AlGaAs/GaAs and AlAs/GaAs multilayers on mesa-patterned GaAs substrate by MOCVD.

Title
The study of facet evolution of AlGaAs/GaAs and AlAs/GaAs multilayers on mesa-patterned GaAs substrate by MOCVD.
Authors
김성일민석기김용김무성박양근이민석박영주
Keywords
MOCVD; GaAs; AlGaAs; facet evolution
Issue Date
1994-01
Publisher
Bull. Korean phys. soc.
Citation
v. 12, no. 1, ?-?
URI
http://pubs.kist.re.kr/handle/201004/24715
Appears in Collections:
KIST Publication > Article
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