SiH//4 를 이용한 텅스텐 화학증착시 압력증가가 증착에 미치는 영향 .

Title
SiH//4 를 이용한 텅스텐 화학증착시 압력증가가 증착에 미치는 영향 .
Authors
금동화박재현이정중
Issue Date
1993-01
Publisher
한국표면공학회지
Citation
v. 26, no. 1, 3-9
URI
http://pubs.kist.re.kr/handle/201004/24769
Appears in Collections:
KIST Publication > Article
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