New method to improve the adhesion strength of tungsten thin film on silicon by W//2N glue layer.

Title
New method to improve the adhesion strength of tungsten thin film on silicon by W//2N glue layer.
Authors
김용태민석기
Issue Date
1992-01
Publisher
Appl. phys. lett.
Citation
v. 61, 537-539
URI
http://pubs.kist.re.kr/handle/201004/24830
Appears in Collections:
KIST Publication > Article
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