The effects of process conditions on the prperties of SiN film in PECVD process.

Title
The effects of process conditions on the prperties of SiN film in PECVD process.
Authors
김용태C. W. NamS. I. Woo
Issue Date
1991-06
Publisher
Proc. int. meeting on chemical eng. & biotechnology: lecture programme, Frankfurt, am Main
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/24853
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE