Effects of electrode configurations on uniformity of copper films on flexible polymer substrate prepared by ECR-MOCVD

Title
Effects of electrode configurations on uniformity of copper films on flexible polymer substrate prepared by ECR-MOCVD
Authors
전법주이중기
Keywords
ECR (Electron Cyclotron Resonance); MOCVD; DC bias; Uniformity; Electrode; Surface resistance
Issue Date
2004-03
Publisher
한국군사과학기술학회지
Citation
VOL 7, NO 1, 34-46
URI
http://pubs.kist.re.kr/handle/201004/25094
ISSN
1598-9127
Appears in Collections:
KIST Publication > Article
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