Multi-scale simulation of plasma generation and film deposition in a circular type DC magnetron sputtering system

Title
Multi-scale simulation of plasma generation and film deposition in a circular type DC magnetron sputtering system
Authors
권의희최선희서태원이원종
Issue Date
2003-10
Publisher
The 4th Asian-European International Conference on Plasma Surface Engineering
Citation
, 184-184
URI
http://pubs.kist.re.kr/handle/201004/25145
Appears in Collections:
KIST Publication > Conference Paper
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