Effect of oxygen plasma treatment on adhesion improvement of Au deposited on Pa-c substrates

Title
Effect of oxygen plasma treatment on adhesion improvement of Au deposited on Pa-c substrates
Authors
이정훈황교선김태송성진욱윤기현안세영
Keywords
Oxygen Plasma; Parylene; Au Adhesion; Surface Energy
Issue Date
2004-05
Publisher
Journal of Korean Physical Society
Citation
VOL 44, NO 5, 1177-1181
URI
http://pubs.kist.re.kr/handle/201004/25153
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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