Study on the proton implantation process for the fabrication of SOI wafer

Title
Study on the proton implantation process for the fabrication of SOI wafer
Authors
우형주최한우김준곤홍완김기동변영태
Keywords
SOI 웨이퍼; 양성자 주입; Ion-cut; ERD; SIMS; 열처리
Issue Date
2003-07
Publisher
2003 KAPRA & KPS/DPP Joint Workshop
Citation
, 38-41
URI
http://pubs.kist.re.kr/handle/201004/25218
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE