Thermal treatment of InGaAs/GaAs self-assembled quantum dots with PECVD-grown SiO₂ capping layer

Title
Thermal treatment of InGaAs/GaAs self-assembled quantum dots with PECVD-grown SiO₂ capping layer
Authors
황성호신재철최원준박영민송진동박용주한일기조운조이정일최정우
Keywords
quantum dot; dielectric capping; thermal treatment
Issue Date
2003-06
Publisher
2003 IEEE International Conference on Plasma Science
Citation
, 427-427
URI
http://pubs.kist.re.kr/handle/201004/25230
Appears in Collections:
KIST Publication > Conference Paper
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