Preparation of 0.5 ㎛ thick self-patternable PZT films by sol-gel procedure for applying to the micro-detection system.

Title
Preparation of 0.5 ㎛ thick self-patternable PZT films by sol-gel procedure for applying to the micro-detection system.
Authors
황재섭김우식박형호김태송
Issue Date
2003-10
Publisher
Microelectronic Engineering
Citation
v. 70, no. 1, 73-77
URI
http://pubs.kist.re.kr/handle/201004/25243
ISSN
0167-9317
Appears in Collections:
KIST Publication > Article
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