Experimental study of hydrogen-ion implantation for SOI fabrication

Title
Experimental study of hydrogen-ion implantation for SOI fabrication
Authors
변영태김형권김태곤
Keywords
Smart-cut; 이온주입; 실리콘 절연체; SOI
Issue Date
2003-10
Publisher
새물리
Citation
v. 47, no. 4, 266-272
URI
http://pubs.kist.re.kr/handle/201004/25254
Appears in Collections:
KIST Publication > Article
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