Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film.

Title
Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film.
Authors
정연식서지윤이동욱전덕영
Issue Date
2003-11
Publisher
Thin Solid Films
Citation
v. 445, no. 1, 63-71
URI
http://pubs.kist.re.kr/handle/201004/25303
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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