Nanostructures of SiNx and Si formed by exposure of ionized gas

Title
Nanostructures of SiNx and Si formed by exposure of ionized gas
Authors
정민철이태경박용주고창훈전승호함철영한문섭박경완
Keywords
nanostructure; quantum confinement effect; TEM; XPS; surface modification
Issue Date
2003-02
Publisher
The 10th Korean Conference on Semiconductors
Citation
, 121-122
URI
http://pubs.kist.re.kr/handle/201004/25361
Appears in Collections:
KIST Publication > Conference Paper
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