Characterizations of vanadium-tungsten-oxide bolometric thin films for uncooled IR detectors

Title
Characterizations of vanadium-tungsten-oxide bolometric thin films for uncooled IR detectors
Authors
한용희문성욱신현준김신근안미숙김근태최인훈오명환
Keywords
볼로메타; 바나듐; 텅스텐; tcr; Microbolometer; TCR; vanadium-tungsten-oxide; oxidation; MEMS
Issue Date
2004-04
Publisher
제6회 한국 MEMS 학술대회
Citation
, 281-286
URI
http://pubs.kist.re.kr/handle/201004/25426
Appears in Collections:
KIST Publication > Conference Paper
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