Variable optical attenuator using parallel plate electrostatic actuator

Title
Variable optical attenuator using parallel plate electrostatic actuator
Authors
김태엽허재성문성욱신현준이상렬
Keywords
Variable optical attenuator; parallel plate actuator; electrostatic force
Issue Date
2004-04
Publisher
한국전기전자재료학회지
Citation
VOL 17, NO 4, 448-452
URI
http://pubs.kist.re.kr/handle/201004/25427
Appears in Collections:
KIST Publication > Article
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