Ammonolysis of Ga2O3 and its application to the sublimation source for the growth of GaN film

Title
Ammonolysis of Ga2O3 and its application to the sublimation source for the growth of GaN film
Authors
박용주오청식염태호유영문
Keywords
substrate; sublimation; ammonolysis; gallium oxide; nitrides; growth from vapor; semiconducting III-V materials
Issue Date
2004-03
Publisher
Journal of Crystal Growth
Citation
VOL 264, 1-6
URI
http://pubs.kist.re.kr/handle/201004/25554
ISSN
0022-0248
Appears in Collections:
KIST Publication > Article
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