Optical properties of multilayer of SiNx/SiNy prepared by PECVD

Title
Optical properties of multilayer of SiNx/SiNy prepared by PECVD
Authors
박용주이태경Chang Hyo Lee김은규
Keywords
multilayer; SiNx/SiNy; Nanostructure; PECVD; photoluminescence; quantum size effect
Issue Date
2004-03
Publisher
Journal of the Korean Physical Sociey
Citation
VOL 44, NO 3, 700-703
URI
http://pubs.kist.re.kr/handle/201004/25555
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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