Comparison of visible photoluminescence from Si ion-irradiated SiO2/Si/SiO2 films fabricated by ion beam sputtering deposition and electron beam evaporation

Title
Comparison of visible photoluminescence from Si ion-irradiated SiO2/Si/SiO2 films fabricated by ion beam sputtering deposition and electron beam evaporation
Authors
김효배손정훈황정남채근화
Keywords
Photoluminescence; Silicon; Nanocrystals; Ion irradiation
Issue Date
2004-11
Publisher
Thin Solid Films
Citation
VOL 467, 176-181
URI
http://pubs.kist.re.kr/handle/201004/25638
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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