ZnNiO thin films deposited by r.f. magnetron sputtering method

Title
ZnNiO thin films deposited by r.f. magnetron sputtering method
Authors
오형택이태경김동우박용주박일우김은규
Keywords
RF magnetron sputtering; ZnNiO; cathodoluminescence; defects; 스핀트로닉스; 마그네트론 스퍼터링; 급속열처리; dilute magnetic semiconductor; rapid thermal anneling
Issue Date
2003-12
Publisher
한국진공학회지; Journal of the Korean Vacuum Society
Citation
VOL 12, NO 4, 269-274
URI
http://pubs.kist.re.kr/handle/201004/25657
Appears in Collections:
KIST Publication > Article
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